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Technical Journal No.4 (April 2003)
Special Papers 1 Fundamental Technologies for Liquid Crystal Displays
CPU on a Glass Substrate Using CG Silicon TFT

Bu-Yeol LeeYasushi KubotaShigeki Imai

For the first time, an entire CPU has been successfully fabricated on a glass substrate suitable for LCD mass production. By using the advanced CG-Silicon Thin Film Transistor (TFT) process, with a maximum processing temperature 550C, it was possible to use Corning 1737 glass as the substrate. The fabricated 8-bit CPU contains approximately 13,000 TFTs, and occupies an area of 169 mm2. The CPU operates successfully in a system with a clock frequency of 3 MHz and a supply voltage of 5V.

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