Bu-Yeol LeeYasushi KubotaShigeki Imai

Abstract
For the first time, an entire CPU has been successfully fabricated on a glass substrate suitable for LCD mass production. By using the advanced CG-Silicon Thin Film Transistor (TFT) process, with a maximum processing temperature 550C, it was possible to use Corning 1737 glass as the substrate. The fabricated 8-bit CPU contains approximately 13,000 TFTs, and occupies an area of 169 mm2. The CPU operates successfully in a system with a clock frequency of 3 MHz and a supply voltage of 5V.