HOMEHigh Concentration Ozonated Water GeneratorApplication Example

High Concentration Ozonated Water Generator

Application Example of Ozonated Water Cleaning for Photoresist Removal

Dissolution and Removal of Resist with Ozonated Water
Test sample surface (top view) observed with a light microscope
 



Even high dose ion implanted resist can be removed
(Recommended to do half ashing as a pretreatment)
Test sample surface (slightly obliquely-top view) observed with a scanning
electron microscope



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