HOMEHigh Concentration Ozonated Water GeneratorFeatures

High Concentration Ozonated Water Generator

Features of SHARP's Ozonated Water
Efficacy of Ozonated Water for the Removal of Photoresist
Running Cost (SHARP's factory data)
Compared with conventional dip cleaning with SPM:
Spin Cleaning: Reduced to 1/13
Dip Cleaning: Reduced to 1/16
Cleaning Time
Spin Cleaning: In about 1 minute
Dip Cleaning: In about 10 minutes
(Sample: 8" wafer, resist thickness: 1μm)
Dimensions (Unit: mm)
Specification
■O3 Water Supply Capability
Concentration Minimum 150mg/L
Temperature Room to 70℃
Flow Rate 8L/min
■Dimensions and Weight
Main Unit (W) 1,200mm × (D) 700mm × (H) 2,000mm (excluding duct height)
Approx. 600kg
O3 Heating Unit (W) 900mm × (D) 700mm × (H) 1,500mm (excluding duct height)
Approx. 400 kg
■Required Utilities (Total of Main and Heating Units)
Power Supply 3 phase, 200V, 65kVA
Deionized Water Min. 10L/min, 0.2-0.3MPa(G)
City Water Min. 10L/min, 0.2-0.3MPa(G)
O2 Gas Min. 15L/min (20℃, 0.1MPa equivalent), 0.5-0.7MPa(G)
N2 Gas Min 0.2L/min (20℃, 0.1MPa equivalent), 0.5-0.7MPa(G)
CO2 Gas Min. 2L/min (0℃, 0.1MPa equivalent), 0.65-0.7MPa(G)
Cooling Water Min. 15L/min, 0.25-0.3MPa(G)
Clean Dry Air Min. 760L/min (20℃, 0.1MPa equivalent), 0.6-0.7MPa(G)
Drain Min. 10L/min
Exhaust Min. 8Nm3/min, -200Pa(G)
* The specifications may be subject to change without notice.

HOMEHigh Concentration Ozonated Water GeneratorFeatures
PreviousTo the top of this page