Development of Flat-Panel X-ray Image Sensors
Yoshihiro IzumiOsamu TeranumaTamotsu SatoKazuhiro Uehara
Hisao OkadaSatoshi TokudaToshiyuki Sato
New flat-panel X-ray image sensors are being studied for medical imaging
applications. The combination of a thin film transistor (TFT) array and X-ray
detection material constitutes the basis of the flat-panel X-ray image sensor.
We developed two prototypes of direct-detection sensors with an amorphous Se film and poly-crystalline CdTe film as the X-ray detection materials. We achieved high spatial resolution and good linear sensitivity with wide dynamic range. These image sensors have great promise as high-performance digital radiography and fluoroscopy systems for the next generation.